Plasma-enhanced atomic layer deposition of iron phosphate as a positive electrode for 3D lithium-ion microbatteries

dc.contributor.author	Dobbelaere, Thomas
dc.contributor.author	Mattelaer, Felix
dc.contributor.author	Dendooven, Jolien
dc.contributor.author	Vereecken, Philippe
dc.contributor.author	Detavernier, Christophe
dc.contributor.imecauthor	Vereecken, Philippe
dc.contributor.orcidimec	Vereecken, Philippe::0000-0003-4115-0075
dc.date.accessioned	2021-10-23T10:38:07Z
dc.date.available	2021-10-23T10:38:07Z
dc.date.issued	2016
dc.identifier.issn	0897-4756
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/26565
dc.identifier.url	http://pubs.acs.org/doi/abs/10.1021/acs.chemmater.6b00853
dc.source.beginpage	3435
dc.source.endpage	3445
dc.source.issue	10
dc.source.journal	Chemistry of Materials
dc.source.volume	28
dc.title	Plasma-enhanced atomic layer deposition of iron phosphate as a positive electrode for 3D lithium-ion microbatteries
dc.type	Journal article
dspace.entity.type	Publication
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