Plasma-enhanced atomic layer deposition of zinc phosphate

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Authors

Dobbelaere, Thomas; Minjauw, Matthias; Tareq, Ahmad; Vereecken, Philippe; Detavernier, Christophe

ISSN

0022-3093

Journal

Journal of Non-Crystalline Solids

Volume

444

Title

Plasma-enhanced atomic layer deposition of zinc phosphate

Publication type

Journal article

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