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Plasma-enhanced atomic layer deposition of zinc phosphate

dc.contributor.authorDobbelaere, Thomas
dc.contributor.authorMinjauw, Matthias
dc.contributor.authorTareq, Ahmad
dc.contributor.authorVereecken, Philippe
dc.contributor.authorDetavernier, Christophe
dc.date.accessioned2021-10-23T10:38:18Z
dc.date.available2021-10-23T10:38:18Z
dc.date.issued2016
dc.identifier.issn0022-3093
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26566
dc.sourceIIOimport
dc.titlePlasma-enhanced atomic layer deposition of zinc phosphate
dc.typeJournal article
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.source.peerreviewyes
dc.source.beginpage43
dc.source.endpage48
dc.source.journalJournal of Non-Crystalline Solids
dc.source.volume444
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0022309316301351
imec.availabilityPublished - imec


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