Show simple item record

Influence of block copolymer composition in grapho-epitaxy directed self-assembly for contact hole multiplication

dc.contributor.authorDoise, Jan
dc.contributor.authorChan, BT
dc.contributor.authorHori, Masafumi
dc.contributor.authorGronheid, Roel
dc.date.accessioned2021-10-23T10:38:52Z
dc.date.available2021-10-23T10:38:52Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26569
dc.sourceIIOimport
dc.titleInfluence of block copolymer composition in grapho-epitaxy directed self-assembly for contact hole multiplication
dc.typeProceedings paper
dc.contributor.imecauthorDoise, Jan
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorGronheid, Roel
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.source.peerreviewno
dc.source.conference2nd International Symposium on DSA
dc.source.conferencedate11/10/2016
dc.source.conferencelocationGrenoble France
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record