Show simple item record

Some challenges for mask making to keep up with the roadmap

dc.contributor.authorJonckheere, Rik
dc.contributor.authorRandall, John
dc.contributor.authorMarschner, Thomas
dc.contributor.authorRonse, Kurt
dc.date.accessioned2021-09-30T12:17:52Z
dc.date.available2021-09-30T12:17:52Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2657
dc.sourceIIOimport
dc.titleSome challenges for mask making to keep up with the roadmap
dc.typeProceedings paper
dc.contributor.imecauthorJonckheere, Rik
dc.contributor.imecauthorRonse, Kurt
dc.contributor.orcidimecJonckheere, Rik::0000-0003-2211-9443
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage313
dc.source.endpage324
dc.source.conference18th Annual BACUS Symposium on Photomask Technology and Management
dc.source.conferencedate16/09/1998
dc.source.conferencelocationRedwood City, CA USA
imec.availabilityPublished - open access
imec.internalnotesSPIE Proceedings; Vol. 3546


Files in this item

Thumbnail
Name:
2670.pdf
Size:
2.003Mb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record