Show simple item record

Some challenges for mask making to keep up with the roadmap

dc.contributor.authorJonckheere, Rik
dc.contributor.authorRandall, John
dc.contributor.authorMarschner, Thomas
dc.contributor.authorRonse, Kurt
dc.date.accessioned2021-09-30T12:18:06Z
dc.date.available2021-09-30T12:18:06Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2658
dc.sourceIIOimport
dc.titleSome challenges for mask making to keep up with the roadmap
dc.typeOral presentation
dc.contributor.imecauthorJonckheere, Rik
dc.contributor.imecauthorRonse, Kurt
dc.contributor.orcidimecJonckheere, Rik::0000-0003-2211-9443
dc.source.peerreviewno
dc.source.conference15th European Conference on Mask Making Technology for Integrated Circuits and Micro-Components; 16-17 November 1998; Munchen, G
dc.source.conferencelocation
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record