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ATLAS simulations of delta-doped Si/SiGe backward diodes

dc.contributor.authorFakhimi, Parastou
dc.contributor.authorGrowden, Tyler
dc.contributor.authorBerger, Paul
dc.date.accessioned2021-10-23T10:47:06Z
dc.date.available2021-10-23T10:47:06Z
dc.date.issued2016-11
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26608
dc.sourceIIOimport
dc.titleATLAS simulations of delta-doped Si/SiGe backward diodes
dc.typeMeeting abstract
dc.source.peerreviewyes
dc.source.beginpage54
dc.source.endpage55
dc.source.conferenceJSPS - FZ-Jülich Workshop on "Atomically Controlled Processing for Ultra-large Scale Integration"
dc.source.conferencedate24/11/2016
dc.source.conferencelocationJülich Germany
imec.availabilityPublished - imec


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