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Optical properties and molecular composition of nitrogen doped diamond thin films grown in microwave CH1/H2/N2 plasma enhanced chemical vapor deposition

dc.contributor.authorFicek, M.
dc.contributor.authorSankaran, Kamatchi
dc.contributor.authorRyl, J.
dc.contributor.authorNiedzialkowski, P.
dc.contributor.authorBogdanowicz, R.
dc.contributor.authorLin, I.N.
dc.contributor.authorHaenen, Ken
dc.date.accessioned2021-10-23T10:49:16Z
dc.date.available2021-10-23T10:49:16Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26618
dc.sourceIIOimport
dc.titleOptical properties and molecular composition of nitrogen doped diamond thin films grown in microwave CH1/H2/N2 plasma enhanced chemical vapor deposition
dc.typeOral presentation
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.source.peerreviewno
dc.source.conferenceHasselt Diamond Workshop - SBDD XXI
dc.source.conferencedate9/03/2016
dc.source.conferencelocationHasselt Belgium
imec.availabilityPublished - imec


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