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"Self-Focusing – SIMS" : composition analysis of thin films beyond the lateral resolution

dc.contributor.authorFranquet, Alexis
dc.contributor.authorDouhard, Bastien
dc.contributor.authorConard, Thierry
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-23T10:53:40Z
dc.date.available2021-10-23T10:53:40Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26635
dc.sourceIIOimport
dc.title"Self-Focusing – SIMS" : composition analysis of thin films beyond the lateral resolution
dc.typeOral presentation
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.source.peerreviewno
dc.source.conferenceWorkshop & Réunion des Utilisateurs Francophones TOF-SIMS (ION-TOF)
dc.source.conferencedate9/03/2016
dc.source.conferencelocationMons Belgium
imec.availabilityPublished - imec


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