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Self focusing SIMS: probing thin film composition in very confined volumes

dc.contributor.authorFranquet, Alexis
dc.contributor.authorDouhard, Bastien
dc.contributor.authorMelkonyan, Davit
dc.contributor.authorFavia, Paola
dc.contributor.authorConard, Thierry
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-23T10:53:55Z
dc.date.available2021-10-23T10:53:55Z
dc.date.issued2016
dc.identifier.issn0169-4332
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26636
dc.sourceIIOimport
dc.titleSelf focusing SIMS: probing thin film composition in very confined volumes
dc.typeJournal article
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.source.peerreviewyes
dc.source.beginpage143
dc.source.endpage152
dc.source.journalApplied Surface Science
dc.source.volume365
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0169433216000829
imec.availabilityPublished - imec


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