Self focusing SIMS: probing thin film composition in very confined volumes

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Authors
Franquet, Alexis; Douhard, Bastien; Melkonyan, Davit; Favia, Paola; Conard, Thierry; Vandervorst, Wilfried
ISSN
0169-4332
Journal
Applied Surface Science
Volume
365
Title
Self focusing SIMS: probing thin film composition in very confined volumes
Publication type
Journal article
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