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Self focusing SIMS: probing thin film composition in very confined volumes
Publication:
Self focusing SIMS: probing thin film composition in very confined volumes
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Date
2016
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Franquet, Alexis
;
Douhard, Bastien
;
Melkonyan, Davit
;
Favia, Paola
;
Conard, Thierry
;
Vandervorst, Wilfried
Journal
Applied Surface Science
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1813
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Acq. date: 2025-12-16
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Views
1813
since deposited on 2021-10-23
1
last month
1
last week
Acq. date: 2025-12-16
Citations