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In-situ ToF-SIMS and SFM measurements of inorganic semiconductor materials

dc.contributor.authorFranquet, Alexis
dc.contributor.authorSpampinato, Valentina
dc.contributor.authorConard, Thierry
dc.contributor.authorMollers, Rudolf
dc.contributor.authorNiehuis, Ewald
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-23T10:54:08Z
dc.date.available2021-10-23T10:54:08Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26637
dc.sourceIIOimport
dc.titleIn-situ ToF-SIMS and SFM measurements of inorganic semiconductor materials
dc.typeOral presentation
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorSpampinato, Valentina
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecSpampinato, Valentina::0000-0003-3225-6740
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.source.peerreviewno
dc.source.conferenceSIMS Europe
dc.source.conferencedate18/09/2016
dc.source.conferencelocationMünster Germany
imec.availabilityPublished - imec


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