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Opportunities and challenges for DSA in logic and memory

dc.contributor.authorGronheid, Roel
dc.contributor.authorSingh, Arjun
dc.contributor.authorDoise, Jan
dc.contributor.authorBoeckx, Carolien
dc.contributor.authorKarageorgos, Ioannis
dc.contributor.authorRyckaert, Julien
dc.contributor.authorPathangi Sriraman, Hari
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorChan, BT
dc.contributor.authorVandenberghe, Geert
dc.date.accessioned2021-10-23T11:01:36Z
dc.date.available2021-10-23T11:01:36Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26667
dc.sourceIIOimport
dc.titleOpportunities and challenges for DSA in logic and memory
dc.typeMeeting abstract
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorSingh, Arjun
dc.contributor.imecauthorDoise, Jan
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorVandenberghe, Geert
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.source.peerreviewno
dc.source.beginpage9777-25
dc.source.conferenceSPIE Advanced Lithography Conference
dc.source.conferencedate21/02/2016
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - imec


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