Publication:

Multiple reuse of the silicon substrate in a porous silicon based layer transfer process

Date

2016

Proceedings Paper

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Author(s)

Hajijafarassar, Alireza

;

Van Nieuwenhuysen, Kris

;

Sharlandziev, Ivan

;

Depauw, Valerie

;

Sivaramakrishnan Radhakrishnan, Hariharsudan

;

;

Debucquoy, Maarten

;

;

Szlufcik, Jozef

;

Abdulraheem, Yaser

;

;

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1969 since deposited on 2021-10-23

Acq. date: 2026-04-07