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Diamond scanning probes with sub-nanometer resolution for advanced nanoelectronics device characterization

dc.contributor.authorHantschel, Thomas
dc.contributor.authorTsigkourakos, Menelaos
dc.contributor.authorZha, Lichen
dc.contributor.authorNuytten, Thomas
dc.contributor.authorParedis, Kristof
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-23T11:07:21Z
dc.date.available2021-10-23T11:07:21Z
dc.date.issued2016
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26690
dc.sourceIIOimport
dc.titleDiamond scanning probes with sub-nanometer resolution for advanced nanoelectronics device characterization
dc.typeJournal article
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorZha, Lichen
dc.contributor.imecauthorNuytten, Thomas
dc.contributor.imecauthorParedis, Kristof
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecNuytten, Thomas::0000-0002-5921-6928
dc.contributor.orcidimecParedis, Kristof::0000-0002-5163-4164
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage46
dc.source.endpage50
dc.source.journalMicroelectronic Engineering
dc.source.volume159
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0167931716300946
imec.availabilityPublished - open access


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