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Diamond electrical probes with sub-nanometer spatial resolution for advanced nanoelectronics device characterization

dc.contributor.authorHantschel, Thomas
dc.contributor.authorYeghoyan, Taguhi
dc.contributor.authorParedis, Kristof
dc.contributor.authorSchulze, Andreas
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-23T11:07:50Z
dc.date.available2021-10-23T11:07:50Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26692
dc.sourceIIOimport
dc.titleDiamond electrical probes with sub-nanometer spatial resolution for advanced nanoelectronics device characterization
dc.typeMeeting abstract
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorParedis, Kristof
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecParedis, Kristof::0000-0002-5163-4164
dc.source.peerreviewno
dc.source.conferenceHasselt Diamond Workshop - SBDD XXI
dc.source.conferencedate9/03/2016
dc.source.conferencelocationHasselt Belgium
imec.availabilityPublished - imec


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