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Sulfurization of metallic and oxidized molybdenum thin films

dc.contributor.authorHeyne, Markus
dc.contributor.authorChiappe, Daniele
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorNuytten, Thomas
dc.contributor.authorConard, Thierry
dc.contributor.authorBender, Hugo
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorRadu, Iuliana
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorNeyts, Erik C.
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-23T11:15:08Z
dc.date.available2021-10-23T11:15:08Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26721
dc.sourceIIOimport
dc.titleSulfurization of metallic and oxidized molybdenum thin films
dc.typeOral presentation
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorNuytten, Thomas
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorRadu, Iuliana
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecNuytten, Thomas::0000-0002-5921-6928
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.contributor.orcidimecRadu, Iuliana::0000-0002-7230-7218
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.conferenceChemCYS 2016 - Chemistry Conference for Young Scientists
dc.source.conferencedate16/03/2016
dc.source.conferencelocationBlankenberge Belgium
imec.availabilityPublished - imec


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