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Low loss CMOS-compatible PECVD silicon nitride waveguides and grating couplers blue light optogenetic applications
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Authors
Hoffman, Luis
;
Subramanian, Ananth
;
Helin, Philippe
;
Du Bois, Bert
;
Baets, Roel
;
Van Dorpe, Pol
;
Gielen, Georges
;
Puers, Bob
;
Braeken, Dries
ISSN
1943-0655
Issue
5
Journal
IEEE Photonics Journal
Volume
8
Title
Low loss CMOS-compatible PECVD silicon nitride waveguides and grating couplers blue light optogenetic applications
Publication type
Journal article
Embargo date
9999-12-31
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