Publication:
Low loss CMOS-compatible PECVD silicon nitride waveguides and grating couplers blue light optogenetic applications
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1952 since deposited on 2021-10-23
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Acq. date: 2026-02-24
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1952 since deposited on 2021-10-23
1last month
Acq. date: 2026-02-24
Citations