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Low loss CMOS-compatible PECVD silicon nitride waveguides and grating couplers blue light optogenetic applications

dc.contributor.authorHoffman, Luis
dc.contributor.authorSubramanian, Ananth
dc.contributor.authorHelin, Philippe
dc.contributor.authorDu Bois, Bert
dc.contributor.authorBaets, Roel
dc.contributor.authorVan Dorpe, Pol
dc.contributor.authorGielen, Georges
dc.contributor.authorPuers, Bob
dc.contributor.authorBraeken, Dries
dc.date.accessioned2021-10-23T11:18:00Z
dc.date.available2021-10-23T11:18:00Z
dc.date.issued2016-08
dc.identifier.issn1943-0655
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26731
dc.sourceIIOimport
dc.titleLow loss CMOS-compatible PECVD silicon nitride waveguides and grating couplers blue light optogenetic applications
dc.typeJournal article
dc.contributor.imecauthorHoffman, Luis
dc.contributor.imecauthorHelin, Philippe
dc.contributor.imecauthorDu Bois, Bert
dc.contributor.imecauthorBaets, Roel
dc.contributor.imecauthorVan Dorpe, Pol
dc.contributor.imecauthorGielen, Georges
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorBraeken, Dries
dc.contributor.orcidimecHoffman, Luis::0000-0002-1489-3669
dc.contributor.orcidimecDu Bois, Bert::0000-0003-0147-1296
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.contributor.orcidimecVan Dorpe, Pol::0000-0003-0918-1664
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage2701211
dc.source.journalIEEE Photonics Journal
dc.source.issue5
dc.source.volume8
dc.identifier.urlhttp://ieeexplore.ieee.org/document/7547949/
imec.availabilityPublished - open access


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