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Plasma-assisted atomic layer deposition of thin film Li2CO3 for all-solid-state Li-Ion batteries
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Authors
Hornsveld, Norah
;
Put, Brecht
;
Kessels, Erwin
;
Vereecken, Philippe
;
Creatore, Mariadriana
Conference
230th ECS Meeting: Pacific Rim Meeting - PRiME
Title
Plasma-assisted atomic layer deposition of thin film Li2CO3 for all-solid-state Li-Ion batteries
Publication type
Meeting abstract
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