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Quasi two-dimensional Si-O superlattices: Atomically controlled growth and electrical properties

dc.contributor.authorJayachandran, Suseendran
dc.contributor.authorSimoen, Eddy
dc.contributor.authorMartens, Koen
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorCaymax, Matty
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorHeyns, Marc
dc.contributor.authorDelabie, Annelies
dc.date.accessioned2021-10-23T11:33:23Z
dc.date.available2021-10-23T11:33:23Z
dc.date.issued2016
dc.identifier.issn2162-8769
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26784
dc.sourceIIOimport
dc.titleQuasi two-dimensional Si-O superlattices: Atomically controlled growth and electrical properties
dc.typeJournal article
dc.contributor.imecauthorJayachandran, Suseendran
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorMartens, Koen
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecMartens, Koen::0000-0001-7135-5536
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.source.peerreviewyes
dc.source.beginpageP396
dc.source.endpageP403
dc.source.journalECS Journal of Solid State Science and Technology
dc.source.issue7
dc.source.volume5
dc.identifier.urlhttp://jss.ecsdl.org/content/5/7/P396.abstract
imec.availabilityPublished - imec


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