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Quasi two-dimensional Si-O superlattices: Atomically controlled growth and electrical properties
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Authors
Jayachandran, Suseendran
;
Simoen, Eddy
;
Martens, Koen
;
Meersschaut, Johan
;
Caymax, Matty
;
Vandervorst, Wilfried
;
Heyns, Marc
;
Delabie, Annelies
ISSN
2162-8769
Issue
7
Journal
ECS Journal of Solid State Science and Technology
Volume
5
Title
Quasi two-dimensional Si-O superlattices: Atomically controlled growth and electrical properties
Publication type
Journal article
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