Publication:

Quasi two-dimensional Si-O superlattices: Atomically controlled growth and electrical properties

Date

2016
Journal article
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dc.contributor.authorJayachandran, Suseendran
dc.contributor.authorSimoen, Eddy
dc.contributor.authorMartens, Koen
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorCaymax, Matty
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorHeyns, Marc
dc.contributor.authorDelabie, Annelies
dc.contributor.imecauthorJayachandran, Suseendran
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorMartens, Koen
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecMartens, Koen::0000-0001-7135-5536
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.date.accessioned2021-10-23T11:33:23Z
dc.date.available2021-10-23T11:33:23Z
dc.date.issued2016
dc.identifier.issn2162-8769
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26784
dc.identifier.urlhttp://jss.ecsdl.org/content/5/7/P396.abstract
dc.source.beginpageP396
dc.source.endpageP403
dc.source.issue7
dc.source.journalECS Journal of Solid State Science and Technology
dc.source.volume5
dc.title

Quasi two-dimensional Si-O superlattices: Atomically controlled growth and electrical properties

dc.typeJournal article
dspace.entity.typePublication
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