Design strategy for the integration of DSA vias in sub-7nm interconnects

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Authors
Karageorgos, Ioannis
Supervisor
Ryckaert, Julien
Conference
DSA meeting - Institute of Nanoscience and Nanotechnology - NCSR Demokritos
Title
Design strategy for the integration of DSA vias in sub-7nm interconnects
Publication type
Oral presentation
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