Impact of DSA process variability on circuit performance

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Authors
Karageorgos, Ioannis; Doise, Jan; Rincon Delgadillo, Paulina; Stucchi, Michele; Baert, Rogier; Gronheid, Roel; Ryckaert, Julien; Vandenberghe, Geert; Dehaene, Wim
Conference
International Symposium on DSA
Title
Impact of DSA process variability on circuit performance
Publication type
Proceedings paper
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