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Investigating stress measurement capabilities using GHz scanning acoustic microscopy for 3D failure analysis
Publication:
Investigating stress measurement capabilities using GHz scanning acoustic microscopy for 3D failure analysis
Date
2016
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Khaled, Ahmad
;
Brand, Sebastian
;
Kogel, M.
;
Appenroth, T.
;
De Wolf, Ingrid
Journal
Microelectronics Reliability
Abstract
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1945
since deposited on 2021-10-23
Acq. date: 2025-10-28
Citations
Metrics
Views
1945
since deposited on 2021-10-23
Acq. date: 2025-10-28
Citations