dc.contributor.author | Khaled, Ahmad | |
dc.contributor.author | Brand, Sebastian | |
dc.contributor.author | Kogel, M. | |
dc.contributor.author | Appenroth, T. | |
dc.contributor.author | De Wolf, Ingrid | |
dc.date.accessioned | 2021-10-23T11:45:17Z | |
dc.date.available | 2021-10-23T11:45:17Z | |
dc.date.issued | 2016 | |
dc.identifier.issn | 0026-2714 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/26823 | |
dc.source | IIOimport | |
dc.title | Investigating stress measurement capabilities using GHz scanning acoustic microscopy for 3D failure analysis | |
dc.type | Journal article | |
dc.contributor.imecauthor | Khaled, Ahmad | |
dc.contributor.imecauthor | De Wolf, Ingrid | |
dc.contributor.orcidimec | Khaled, Ahmad::0000-0003-2892-3176 | |
dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 336 | |
dc.source.endpage | 340 | |
dc.source.journal | Microelectronics Reliability | |
dc.source.volume | 64 | |
dc.identifier.url | http://www.sciencedirect.com/science/article/pii/S0026271416302050 | |
imec.availability | Published - imec | |
imec.internalnotes | ESREF conference 19-22 sept. 2016 | |