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Electrical properties of SiGe layers grown by LPE and CVD

dc.contributor.authorKruger, O.
dc.contributor.authorSeifert, W.
dc.contributor.authorKittler, M.
dc.contributor.authorGutjahr, A.
dc.contributor.authorSilier, I.
dc.contributor.authorKonuma, M.
dc.contributor.authorSaid, Khalid
dc.contributor.authorCaymax, Matty
dc.contributor.authorPoortmans, Jef
dc.date.accessioned2021-09-30T12:24:40Z
dc.date.available2021-09-30T12:24:40Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2683
dc.sourceIIOimport
dc.titleElectrical properties of SiGe layers grown by LPE and CVD
dc.typeProceedings paper
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage185
dc.source.endpage189
dc.source.conferenceProceedings of the 10th Conference on Semiconducting and Insluating Materials - SIMC-X
dc.source.conferencedate1/06/1998
dc.source.conferencelocationBerkeley, CA USA
imec.availabilityPublished - open access


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