dc.contributor.author | Krishtab, Mikhail | |
dc.contributor.author | de Marneffe, Jean-Francois | |
dc.contributor.author | De Gendt, Stefan | |
dc.date.accessioned | 2021-10-23T11:54:25Z | |
dc.date.available | 2021-10-23T11:54:25Z | |
dc.date.issued | 2016 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/26850 | |
dc.source | IIOimport | |
dc.title | Plasma induced damage mitigation in spin-on self-assembly based ultra low-k dielectrics using template residues | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Krishtab, Mikhail | |
dc.contributor.imecauthor | de Marneffe, Jean-Francois | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.conference | Plasma Etch and Strip in Microtechnology - PESM | |
dc.source.conferencedate | 9/05/2016 | |
dc.source.conferencelocation | Grenoble France | |
dc.identifier.url | http://pesm2016.insight-outside.fr/index.php?langue=en&onglet=11&acces=&idUser=&emailUser=&messageConfirmation= | |
imec.availability | Published - open access | |