Publication:

EUV process establishment through litho and etch for N7 node

Date

2016

Proceedings Paper

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Author(s)

Kuwahara, Yuhei

;

Kawakami, Shinichiro

;

;

Matsunaga, Koichi

;

Nafus, Kathleen

;

Foubert, Philippe

;

Metrics

1931 since deposited on 2021-10-23

2last month

Acq. date: 2025-12-10