EUV process establishment through litho and etch for N7 node

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Authors
Kuwahara, Yuhei; Kawakami, Shinichiro; Kubota, Minoru; Matsunaga, Koichi; Nafus, Kathleen; Foubert, Philippe; Mao, Ming
Conference
Extreme Ultraviolet (EUV) Lithography VII
Title
EUV process establishment through litho and etch for N7 node
Publication type
Proceedings paper
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