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Novel method for conformal LiMn2O4 thin films fabrication on planar and 3D microstructure substrates

dc.contributor.authorLabyedh, Nouha
dc.contributor.authorTimmermans, Marina
dc.contributor.authorMattelaer, Felix
dc.contributor.authorMees, Maarten
dc.contributor.authorDetavernier, Christophe
dc.contributor.authorVereecken, Philippe
dc.date.accessioned2021-10-23T12:00:39Z
dc.date.available2021-10-23T12:00:39Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26869
dc.sourceIIOimport
dc.titleNovel method for conformal LiMn2O4 thin films fabrication on planar and 3D microstructure substrates
dc.typeProceedings paper
dc.contributor.imecauthorLabyedh, Nouha
dc.contributor.imecauthorTimmermans, Marina
dc.contributor.imecauthorMees, Maarten
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecLabyedh, Nouha::0000-0002-1036-0988
dc.contributor.orcidimecTimmermans, Marina::0000-0001-9805-8259
dc.contributor.orcidimecMees, Maarten::0000-0001-7217-5510
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.source.peerreviewyes
dc.source.beginpageE04-1604
dc.source.conference230th ECS Meeting: PRiME
dc.source.conferencedate2/10/2016
dc.source.conferencelocationHonolulu, HI USA
dc.identifier.urlhttps://ecs.confex.com/ecs/230/webprogram/Paper94968.html
imec.availabilityPublished - imec


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