Publication:
Novel method to achieve area selective ALD on copper metal vs. SiO2using vapor-phase deposited SAMS
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1884 since deposited on 2021-10-23
1last month
Acq. date: 2026-09-16
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Views
1884 since deposited on 2021-10-23
1last month
Acq. date: 2026-09-16
Citations