Processing technologies for advanced Ge devices

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Authors
Loo, Roger; Hikavyy, Andriy; Witters, Liesbeth; Schulze, Andreas; Arimura, Hiroaki; Cott, Daire; Mitard, Jerome; Porret, Clément; Mertens, Hans; Ryan, Paul; Wall, John; Matney, Kevin; Wormington, Matthew; Favia, Paola; Richard, Olivier; Bender, Hugo; Horiguchi, Naoto; Collaert, Nadine; Thean, Aaron
Conference
SiGe, Ge, and Related Materials: Materials, Processing, and Devices 7
Title
Processing technologies for advanced Ge devices
Publication type
Proceedings paper
Embargo date
9999-12-31
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