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Processing technologies for advanced Ge devices
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Authors
Loo, Roger
;
Hikavyy, Andriy
;
Witters, Liesbeth
;
Schulze, Andreas
;
Arimura, Hiroaki
;
Cott, Daire
;
Porret, Clément
;
Mertens, Hans
;
Ryan, Paul
;
Wall, John
;
Matney, Kevin
;
Wormington, Matthew
;
Horiguchi, Naoto
;
Collaert, Nadine
;
Thean, Aaron
Conference
PRiME 2016 - 230th ECS Meeting (Fall) - Electrochemical Society: SiGe, Ge & Related Compounds: Materials, Processing and Devices
Title
Processing technologies for advanced Ge devices
Publication type
Meeting abstract
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