Authors

Macambira, Christian M.; Itocazu, Victor T.; Almeida, Luciano M.; Martino, Joao; Simoen, Eddy; Claeys, Cor

Conference

31st Symposium on Microelectronics Technology and Devices - SBMICRO

Title

Ground plane influence on zero-temperature-coefficient in SOI UTBB MOSFETs with different silicon film thicknesses

Publication type

Proceedings paper

Embargo date

9999-12-31