Modelling, simulation and experiment of both uniform and stepped thickness cMUT cells

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Authors
Mao, Shengping; Rochus, Veronique; Nauwelaers, Bart; Brondani Torri, Guilherme; Tilmans, Harrie; Rottenberg, Xavier
Conference
15th Conference on Micromachined Ultrasonic Transducers - MUT
Title
Modelling, simulation and experiment of both uniform and stepped thickness cMUT cells
Publication type
Oral presentation
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