dc.contributor.author | Margetis, Joe | |
dc.contributor.author | Mosleh, Aboozar | |
dc.contributor.author | Ghetmiri, Seyed Amir | |
dc.contributor.author | Bhargava, Nupur | |
dc.contributor.author | Yu, Shui-Qing | |
dc.contributor.author | Profijt, Harald | |
dc.contributor.author | Kohen, David | |
dc.contributor.author | Loo, Roger | |
dc.contributor.author | Vohra, Anurag | |
dc.contributor.author | Tolle, John | |
dc.date.accessioned | 2021-10-23T12:31:16Z | |
dc.date.available | 2021-10-23T12:31:16Z | |
dc.date.issued | 2016-05 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/26959 | |
dc.source | IIOimport | |
dc.title | Ge1-xSnx and SiyGe1-x-ySnx epitaxy on a commercial CVD reactor | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Loo, Roger | |
dc.contributor.imecauthor | Vohra, Anurag | |
dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
dc.contributor.orcidimec | Vohra, Anurag::0000-0002-2831-0719 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 4 | |
dc.source.endpage | 5 | |
dc.source.conference | 7th International Symposium on Control of Semiconductor Interfaces / International Si Technology and Device Meeting | |
dc.source.conferencedate | 7/06/2016 | |
dc.source.conferencelocation | Nagoya Japan | |
imec.availability | Published - imec | |