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Emitter shape evolution during field evaporation and its impact on the reconstructed data of SiGe fins embedded in SiO2

dc.contributor.authorMelkonyan, Davit
dc.contributor.authorArnoldi, Laurent
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorKumar, Arul
dc.contributor.authorVurpillot, Francois
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-23T12:42:21Z
dc.date.available2021-10-23T12:42:21Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26990
dc.sourceIIOimport
dc.titleEmitter shape evolution during field evaporation and its impact on the reconstructed data of SiGe fins embedded in SiO2
dc.typeMeeting abstract
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.source.peerreviewno
dc.source.conferenceAPT&M
dc.source.conferencedate12/06/2016
dc.source.conferencelocationGyeongju Korea
imec.availabilityPublished - imec


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