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Specification of trace metal contamination for image sensors

dc.contributor.authorMertens, Paul
dc.contributor.authorLavizzari, Simone
dc.contributor.authorGuerrieri, Stefano
dc.date.accessioned2021-10-23T12:49:22Z
dc.date.available2021-10-23T12:49:22Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27007
dc.sourceIIOimport
dc.titleSpecification of trace metal contamination for image sensors
dc.typeProceedings paper
dc.contributor.imecauthorMertens, Paul
dc.source.peerreviewyes
dc.source.beginpage309
dc.source.endpage312
dc.source.conferenceUltra Clean Processing of Semiconductor Surfaces XIII - UCPSS
dc.source.conferencedate12/09/2016
dc.source.conferencelocationKnokke-Heist Belgium
dc.identifier.urlhttp://www.scientific.net/SSP.255.309
imec.availabilityPublished - imec


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