III-V fin patterning in SADP scheme

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Authors
Milenin, Alexey; Camerotto, Elisabeth; Sun, Noel; Boccardi, Guillaume; Vertommen, Johan; Piumi, Daniele
Conference
Plasma Etch and Strip in Microtechnology - PESM
Title
III-V fin patterning in SADP scheme
Publication type
Meeting abstract
Embargo date
9999-12-31
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