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Three-dimensional amorphous TiO2 thin-film electrodes deposited on micro-pillars by spatial atomic layer deposition for Li+-ion batteries
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Authors
Moitzheim, Sebastien
;
Balder, Ellis
;
Poodt, Paul
;
Unnikrishnan, Sandeep
;
Vereecken, Philippe
Conference
230th ECS Meeting: PRiME
Title
Three-dimensional amorphous TiO2 thin-film electrodes deposited on micro-pillars by spatial atomic layer deposition for Li+-ion batteries
Publication type
Proceedings paper
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