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An O2+ probe energy study for boron quantification in Si1 xGex (0 <= x <= 1) using secondary ion mass spectrometry
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An O2+ probe energy study for boron quantification in Si1 xGex (0 <= x <= 1) using secondary ion mass spectrometry
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Date
2016
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Morris, Richard
Journal
Applied Surface Science
Abstract
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1848
since deposited on 2021-10-23
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Acq. date: 2025-12-18
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Metrics
Views
1848
since deposited on 2021-10-23
1
last month
Acq. date: 2025-12-18
Citations