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An O2+ probe energy study for boron quantification in Si1 xGex (0 <= x <= 1) using secondary ion mass spectrometry

dc.contributor.authorMorris, Richard
dc.date.accessioned2021-10-23T13:01:47Z
dc.date.available2021-10-23T13:01:47Z
dc.date.issued2016
dc.identifier.issn0169-4332
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27041
dc.sourceIIOimport
dc.titleAn O2+ probe energy study for boron quantification in Si1 xGex (0 <= x <= 1) using secondary ion mass spectrometry
dc.typeJournal article
dc.contributor.imecauthorMorris, Richard
dc.contributor.orcidimecMorris, Richard::0000-0002-0902-7088
dc.source.peerreviewyes
dc.source.beginpage778
dc.source.endpage783
dc.source.journalApplied Surface Science
dc.source.volume390
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0169433216317421
imec.availabilityPublished - imec


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