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Si1-xGex/Si interface profiles measured to sub-nanometer precision using uleSIMS energy sequencing

dc.contributor.authorMorris, Richard
dc.contributor.authorHase, Thomas
dc.contributor.authorSanchez, Ana
dc.contributor.authorRowlands, George
dc.date.accessioned2021-10-23T13:02:30Z
dc.date.available2021-10-23T13:02:30Z
dc.date.issued2016
dc.identifier.issn1044-0305
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27043
dc.sourceIIOimport
dc.titleSi1-xGex/Si interface profiles measured to sub-nanometer precision using uleSIMS energy sequencing
dc.typeJournal article
dc.contributor.imecauthorMorris, Richard
dc.contributor.orcidimecMorris, Richard::0000-0002-0902-7088
dc.source.peerreviewyes
dc.source.beginpage1694
dc.source.endpage1702
dc.source.journalJournal of the American Society for Mass Spectrometry
dc.source.issue10
dc.source.volume27
dc.identifier.urlhttp://rd.springer.com/article/10.1007%2Fs13361-016-1439-4
imec.availabilityPublished - imec


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