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Si1-xGex/Si interface profiles measured to sub-nanometer precision using uleSIMS energy sequencing
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Authors
Morris, Richard
;
Hase, Thomas
;
Sanchez, Ana
;
Rowlands, George
ISSN
1044-0305
Issue
10
Journal
Journal of the American Society for Mass Spectrometry
Volume
27
Title
Si1-xGex/Si interface profiles measured to sub-nanometer precision using uleSIMS energy sequencing
Publication type
Journal article
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