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Transfer printing of silicon-on-insulator devices on silicon nitride waveguide circuits: design of coupling structures and process development

dc.contributor.authorMuliuk, Grigorij
dc.contributor.authorYe, Nan
dc.contributor.authorUvin, Sarah
dc.contributor.authorTrindade, Antonio
dc.contributor.authorBower, Chris
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorRoelkens, Gunther
dc.date.accessioned2021-10-23T13:06:26Z
dc.date.available2021-10-23T13:06:26Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27053
dc.sourceIIOimport
dc.titleTransfer printing of silicon-on-insulator devices on silicon nitride waveguide circuits: design of coupling structures and process development
dc.typeProceedings paper
dc.contributor.imecauthorMuliuk, Grigorij
dc.contributor.imecauthorUvin, Sarah
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorRoelkens, Gunther
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecRoelkens, Gunther::0000-0002-4667-5092
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage167
dc.source.endpage170
dc.source.conferenceProceedings Symposium IEEE Photonics Society Benelux
dc.source.conferencedate17/11/2016
dc.source.conferencelocationGent Belgium
imec.availabilityPublished - open access
imec.internalnotesISBN 978-9-0825-0050-9


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