Authors

Murota, Junichi; Yamamoto, Yuchi; Costina, Ioan; Tillack, Bernd; Le Thanh, Vin; Loo, Roger; Caymax, Matty

Conference

IEEE 13th International Conference on Solid-State and Integrated-Circuit Technology - ICSICT

Title

Atomically controlled processing for Ge CVD epitaxial growth

Publication type

Proceedings paper