Show simple item record

Dopant segregation in Si and Ge CVD epitaxial growth

dc.contributor.authorMurota, Junichi
dc.contributor.authorYamamoto, Yuchi
dc.contributor.authorCostina, Ioan
dc.contributor.authorTillack, Bernd
dc.contributor.authorLe Thanh, Vin
dc.contributor.authorLoo, Roger
dc.contributor.authorCaymax, Matty
dc.date.accessioned2021-10-23T13:09:39Z
dc.date.available2021-10-23T13:09:39Z
dc.date.issued2016-11
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27061
dc.sourceIIOimport
dc.titleDopant segregation in Si and Ge CVD epitaxial growth
dc.typeMeeting abstract
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewyes
dc.source.beginpage33
dc.source.endpage34
dc.source.conference8th International Workshop on Advanced Materials Science and Nanotechnology - IWAMSN
dc.source.conferencedate8/11/2016
dc.source.conferencelocationHa Long City Vietnam
imec.availabilityPublished - imec
imec.internalnoteshttp://iwamsn.ac.vn/upload/IWAMSN2016%20Abstract%20Book.pdf


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record