Authors

Murota, Junichi; Yamamoto, Yuchi; Costina, Ioan; Tillack, Bernd; Le Thanh, Vin; Loo, Roger; Caymax, Matty

Conference

JSPS - FZ-Jülich Workshop on "Atomically Controlled Processing for Ultra-large Scale Integration"

Title

Dopant segregation in Si and Ge CVD epitaxial growth

Publication type

Meeting abstract